Manufacturing Process

MOCVD Epitaxy

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MOCVD

Metal-Organic Chemical Vapor Deposition (MOCVD) is a critical semiconductor thin-film deposition technology. The core principle involves the use of metal-organic compounds and other reactive gases in the vapor phase, which undergo chemical reactions on the substrate surface at high temperatures, leading to the deposition of high-quality crystalline films. MOCVD is widely used in the manufacturing of optoelectronic devices such as Light Emitting Diodes (LEDs), Laser Diodes, High-Speed Transistors, and Solar Cells.

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E-Beam Writer

An E-Beam Writer uses a precisely controlled focused electron beam to directly write pre-designed patterns onto the surface of a wafer coated with an electron resist. The pattern is then transferred to the wafer via etching or deposition processes. This technology is widely used in semiconductor lasers and micro-nano fabrication fields.

Wafer Manufacturing

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Lithography - Mask Aligner Stepper (4")

 

Achieving more exposure accuracy by using high accuracy optical and step system to move on wafer to process exposure.

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Thin film - PECVD

 

Using plasma to dissociate the reaction gas and cause it to undergo a chemical reaction then deposition on wafer surface to form a thin film.
PECVD: Plasma Enhanced Chemical Vapor Deposition

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Etch - Auto Wet Bench 

Put the wafer in tank of acid, alkaline or organic solutions, using chemical corrosion to process etching.

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Furnace - Vertical Furnace  

Put the wafer in the vertical quartz tube to process oxidation by control temperature and moisture to fine tune.

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Lapping - Wafer Thinning

The process reduces the thickness of the wafer by grinding.

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Die Testing

Each die (chip) on the wafer is tested and classified based on its optoelectronic properties.

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Wafer Dicing

Use a die saw or laser beam to separate the wafer into individual dies.

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Sorting

Based on the die testing data, the chips are categorized and selected accordingly.

TO-Can Package Assembly

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Die Bonding

Through the pattern recognition system, the robotic arm accurately places the die (chip) to the designated position.

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Wire Bonding

The gold wire through heat, pressure and ultrasonic bonds on the die (chip) to the external conductive pins, transmitting the internal signals to the external circuit.

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Capping

To seal the cap and header using the resistance welder. To prevent gas or liquid entering the component.

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Component Testing

The component undergoes optical, electrical, or environmental testing to ensure it meets specifications.

COB (Chip-On-Board) Packaging

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Die Bonding

Through the image recognition system, the robotic arm accurately attaches the die (chip) and IC to the designated position of the circuit board (PCBA).

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Wire bonding

Gold wires are used to connect the contacts on the die (chip) and IC to the circuit board through heat, pressure and ultrasound.

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Laser Cutting

Using laser beams, the COB (Chip-On-Board) packaged circuit board (PCBA) is divided into individual optoelectronic modules (OE Modules).

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Testing

The optoelectronic modules are connected to a standard light source and powered on to test if their characteristics meet the required specifications.

Sub-Module Assembly (OSA)

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Alignment

After automatically searching for the TO's optimal optical response position, UV curing adhesive is used to temporarily fix the component and fiber optic connector.

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Component Testing

Provide components with optical light or electricity to detect whether the product meets the specifications.To screen out good products and eliminate defective products.

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Gluing

An adhesive is used to permanently fix the component (TO) and fiber optic connector.

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Soldering

A soldering iron is used to heat and apply solder to attach the component to the designated circuit board or connecting cable.

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