Stepper

Achieving more exposure accuracy by using high accuracy optical and step system to move on wafer to process exposure.

PECVD

Using plasma to dissociate the reaction gas and cause it to undergo a chemical reaction then deposition on wafer surface to form a thin film.

化學-自動蝕刻

Put the wafer in tank of acid, alkaline or organic solutions, using chemical corrosion to process etching.

爐管-垂直式爐管

Put the wafer in the vertical quartz tube to process oxidation by control temperature and moisture to fine tune.

E-Beam Writer

An e beam writer uses a precisely controlled, focused electron beam to directly write a pre-designed pattern onto a resist-coated wafer surface. This pattern is then transferred onto the wafer through etching or deposition processes. It is widely used in semiconductor laser and micro/nanofabrication.。

Lapping

The process reduces the thickness of the wafer by grinding.